Zygo Corporation
10/16/2025 | Press release | Distributed by Public on 10/16/2025 03:41
Comparison of theory with the experimental characterization of the spatial freq...
10/16/2025
Comparison of theory with the experimental characterization of the spatial frequency response of interferometers using a binary pseudo-random array sample
Abstract
Experimental evaluations of the surface height response of an interference microscope using a binary pseudo-random array are compared with a Fourier optics model. Measurements of key instrument characteristics, including the illumination, imaging, and obscuring apertures of three different Mirau objectives, support the theoretical calculations. Agreement between experimental and theoretical modeling confirms the predictability of the spatial frequency response for the purpose of specification and optimization of instrument configuration for specific metrology tasks. The results also provide confidence in optional methods of compensating for the decrease in instrument response with spatial frequency.
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Zygo Corporation published this content on October 16, 2025, and is solely responsible for the information contained herein. Distributed via Public Technologies (PUBT), unedited and unaltered, on October 16, 2025 at 09:41 UTC. If you believe the information included in the content is inaccurate or outdated and requires editing or removal, please contact us at [email protected]