Liquid Assets: Water in the semiconductor industry

Water scarcity is more than an environmental and public health concern; it also poses a serious risk to industry and the economy. One sector that relies extensively on a steady supply of clean water is the semiconductor industry. Ultrapure water is required at nearly every phase of the manufacturing process. Semiconductor devices are so small and sensitive that any water impurity, even in parts per trillion, can lead to costly manufacturing defects. This is why manufacturers require a reliable source of ultrapure water during the chip production process.

To discuss how advanced technologies enable manufacturers to mitigate water shortage risks, reduce reliance on municipal water, and boost their sustainability credits, Making Waves sat down with Glen Sundstrom, UPW Technical Director for the microelectronics vertical market team at Xylem.

Why is it essential for semiconductor manufacturers to plan for water shortages?

According to the UN Environment Programme, "Semiconductor manufacturing is one of the sub-sectors that is particularly exposed to drought risk due to its high water intensity relative to output." A recent study found that at least 40% of semiconductor manufacturing facilities will be located in watersheds likely to face high water stress risk by 2030.

With so many plants in areas struggling to maximize water security, it is important to minimize reliance on external water supplies such as municipal, potable water.

Water shortages have already caused disruptions for the industry - during a record drought in Taiwan several years ago, companies were forced to truck in water to maintain production levels.

What technologies exist to help semiconductor manufacturers tackle water shortage risks?

Semiconductor companies are harnessing advanced technologies to optimize their water systems and mitigate water risks. These best-in-class solutions enable manufacturers to treat, manage and reuse water more efficiently. Plants that embrace water reuse have reduced the impact of water shortages and minimized their reliance on external municipal water. One standout is Silfex, a leading provider of precision components used to make and operate semiconductor manufacturing equipment.

Silfex partnered with Xylem to dramatically improve water sustainability at its Springfield, Ohio, facility.

Together they designed a brine recovery reverse osmosis membrane and ultrapure water system to capture reverse osmosis (RO) reject waters and overflow from its precision cleaning processes and recycle that water throughout its operations. The results have been transformative.

How did Silfex identify opportunities to drive sustainability at the plant and gain traction?

As a first step, operators at Silfex's Ohio facility conducted a comprehensive assessment of the plant's water treatment systems. This involved a system-by-system examination to gauge the volume and chemical composition of its individual waste streams. Operators categorized each component based on the ease and reliability of treatment options to uncover immediate opportunities and potential long-term solutions to increase the use of reuse.

This process helped Silfex identify and achieve quick wins, including recovering reserve osmosis reject waters through an innovative brine recovery RO membrane - resulting in a 15% reduction of select ultrapure water system waste streams.

How did Silfex build on these early wins and optimize its wastewater streams?

The Silfex facility was still producing a significant amount of cleanroom wastewater that had potential for recovery and reuse. After an in-depth analysis of the waste streams exiting the cleanroom, Silfex and Xylem developed a plan to segregate, route and individually treat streams that could be recovered with minimal risk to maximize recycling opportunities. Silfex increased stakeholder buy-in by bringing together process owners to identify incoming water quality requirements, limitations and water quality implications for each stream, ensuring quality standards were met.

By finding innovative ways to collect and sort cleanroom wastewater, the Silfex location can recycle and reuse up to 80% of its discharge, which would otherwise go to waste streams.

This major step forward will save the Ohio manufacturing plant millions of gallons of water annually, drastically reduce its water consumption and increase its resilience to any supply shocks. The system will also reduce the need for pre-treated municipal source water, resulting in significant savings on water-softening salt and other chemicals.

"Innovation and continuous improvement are part of our core values at Silfex, and this project is a great example of those values in action," said Rob Skrobak, General Manager of Silfex.

How is Silfex's commitment to water recycling innovation advancing the company's sustainability goals?

Silfex's success in Ohio is helping advance its parent company Lam Research Corporation's broader sustainability ambitions. Lam Research has committed to exploring and investing in water-saving technologies and efficiency upgrades, particularly finding ways to repurpose process-based wastewater to support other areas of operations. The company highlighted the Ohio project in its annual sustainability report as a key example of its efforts to manage water responsibly and sustainably. Lam Research has already exceeded its goal to achieve 17 million gallons of water savings in water-stressed regions from a 2019 baseline by 2025 - and even updated its 2025 goal to 80 million gallons of savings.

In 2023, Silfex was recognized as the winner of Evoqua's North American Annual Water Sustainability Award.

Read more on Xylem's Microelectronics solutions.

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