NIST - National Institute of Standards and Technology

09/02/2025 | Press release | Archived content

300 mm Wafer-Scale SiN Platform for Broadband Soliton Microcombs Compatible with Alkali Atomic References

Author Affiliations

Shao-Chien Ou,1,2 Alin O. Antohe,3 Lewis G. Carpenter,3 Gregory Moille,1,2 and Kartik Srinivasan1,2,*

1Joint Quantum Institute, NIST/University of Maryland, College Park, Maryland, USA

2Microsystems and Nanotechnology Division, National Institute of Standards and Technology, Gaithersburg, Maryland, USA

3American Institute of Manufacturing Integrated Photonics (AIM Photonics), Research Foundation SUNY, Albany, New York, USA

*Corresponding author: [email protected]

ORCID

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