University of Adelaide to Install Australia's First Atomic Layer Etching System from Samco Inc.

Samco Inc. (TSE: 6387), a leading manufacturer of semiconductor processing equipment, announced the sale of its advanced etching system, the RIE-400iP-ALE, to the University of Adelaide, marking the first introduction of Atomic Layer Etching (ALE) technology in Australia. The system, supplied in partnership with Samco's sole Australian distributor Ezzi Vision, is scheduled to ship from Samco's Kyoto factory in December 2025 and will be installed in the University's new AUD $8 million Quantum Materials and Device Fabrication Lab, building on the University's historic strengths in physics, engineering and material science.

This acquisition was supported through the Australian Research Council's Linkage Infrastructure, Equipment and Facilities (LIEF) scheme, which awarded nearly AUD $1 million to establish the National Atomic Layer Etching Facility at the University of Adelaide. This project marks the first introduction of Atomic Layer Etching (ALE) technology in Australia and represents a major step in the country's semiconductor research capabilities.

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The RIE-400iP-ALE system will enable inductively coupled plasma reactive ion etching (ICP-RIE) and atomic layer etching of III-V semiconductor materials including Gallium Nitride (GaN), Gallium Arsenide (GaAs), and Indium Phosphide (InP). With precise layer-by-layer removal, excellent etch depth control and uniformity, and ultra-low surface damage the system is ideally suited for fabrication of next-generation nanoscale electronic and photonic devices.

"The establishment of Australia's first Atomic Layer Etching facility represents a major step forward for our research community," commented Dr. Andy Boes of the Institute for Photonics and Advanced Sensing (IPAS), University of Adelaide. "With Samco's RIE-400iP-ALE system, we will be able to precisely process III-V semiconductor materials at the atomic scale, enabling advances in quantum technologies, photonics, and nanoscale electronics. This capability will accelerate collaborations across disciplines and strengthen Australia's global position in semiconductor and photonics research." Tsukasa Kawabe, President and COO of Samco Inc., added, "We are proud to support the University of Adelaide in launching Australia's first Atomic Layer Etching facility. This project highlights the importance of ALE technology for next-generation device fabrication, particularly in III-V materials. At Samco, we are committed to advancing plasma processing technologies that help researchers worldwide push the boundaries of innovation. We also appreciate the support of our distributor Ezzi Vision to our Australian customers." This sale also represents Samco's second overseas delivery of an ALE system, further underscoring the company's leadership in atomic layer etching technology for compound semiconductor applications.

About the University of Adelaide, Institute for Photonics and Advanced Sensing (IPAS)

The Institute for Photonics and Advanced Sensing (IPAS) at the University of Adelaide conducts cross-disciplinary research in photonics, sensing technologies, and advanced manufacturing. IPAS scientists collaborate with global partners to develop solutions with impact in defence, health, energy, and advanced communications. For more information, visit www.adelaide.edu.au/ipas.

About Samco Inc.

Samco Inc. (TSE: 6387) stands for Semiconductor And Materials Company, is a leading manufacturer of processing equipment for the semiconductor and related industries founded by Mr. Osamu Tsuji in Kyoto, Japan in 1979. Over the past forty-six years, nearly 5,000 Samco systems have been installed and used in 35 different countries. Its equipment and thin film technology are widely adopted in the fabrication of semiconductor devices, including SiC/GaN power/RF devices, GaAs VCSELs, InP Laser Diodes, MEMS, BAW/SAW Filters, TSVs, advanced packaging, and more.

Learn more at https://www.samco.co.jp/en/.

About Ezzi Vision

Ezzi Vision, established in 2007 and based in Melbourne, Victoria, Australia, is a leading distributor and supplier of high-quality vacuum products, systems, glove boxes, and thin film coating equipment. The company specializes in providing reliable industrial vacuum solutions to universities, research institutions, and scientific institutes across Australia and New Zealand, with a strong emphasis on exceptional service and attention to detail. For more information, visit www.ezzivision.com.au.